Xuelun Wang, Xixi Zhao, Tokio Takahashi, Daisuke Ohori, Seiji Samukawa. 3.5 × 3.5 μm2 GaN blue micro-light-emitting diodes with negligible sidewall surface nonradiative recombination. Nature Communications. 2023
Daisuke Ohori, Takahiro Ishihara, Xuelun Wang, Kazuhiko Endo, Tsau-Hua Hsieh, Yiming Li, Nobuhiro Natori, Kazuma Matsui, Seiji Samukawa. Hydrogen iodide (HI) neutral beam etching characteristics of InGaN and GaN for micro-LED fabrication. Nanotechnology. 2023
Tomoki Harada, Daisuke Ohori, Kazuhiko Endo, Seiji Samukawa, Tetsuo Ikari, Atsuhiko Fukuyama. Lifetime of photoexcited carriers in space-controlled Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method. Journal of Applied Physics. 2023. 133. 12
Yi-Ho Chen, Daisuke Ohori, Muhammad Aslam, Yao-Jen Lee, Yiming Li, Seiji Samukawa. Enhancing the Performance of E-Mode AlGaN/GaN HEMTs With Recessed Gates Through Low-Damage Neutral Beam Etching and Post-Metallization Annealing. IEEE Open Journal of Nanotechnology. 2023
Firman Mangasa Simanjuntak, Takeo Ohno, Kana Minami, Seiji Samukawa. Transparent ZnO resistive switching memory fabricated by neutral oxygen beam treatment. Japanese Journal of Applied Physics. 2022. 61. SM. SM1010-SM1010
Atomic Layer Etching, Deposition and Modification Processes for Novel Nano-materials and Nano-devices
(3rd Asia-Pacific Conference on Plasma Physics 2019)
Atomic Layer Defect-free Etching for Future sub-10nm Nano-devices
(2019 International Electron, Devices and Materials Symposium 2019)
Creating Green Nanostructures and Nanomaterials for Advanced Energy Nanodevices
(IEEE Distinguished Lecturer Program (Universiti Malaysia Perlis 2019)
Creating Green Nanostructures and Nanomaterials for Advanced Energy Nanodevices
(IEEE International Microwave, Electron Devices & Solid-State Circuit Symposium (IMESS) 2019 2019)
2019/01 - The Institute of Electrical and Electronics Engineers ディ スティングイッシュト・レクチャラー ディ スティングイッシュト・レクチャラー
2019 - IEEE IEEE Distinguished Lecturers 2019 Creating Green Nanostructures and Nanomaterials for Advanced Energy Nanodevices
2018/12 - IEEE International Electron Device Meeting IEEE Fellow
2016/08/25 - IEEE 16th International Conference on Nanotechnology Best Paper Award
2015/11/20 - International Electron Devices and Materials Symposium 2015 International Electron Devices and Materials Symposium 2015 Best Paper Award Miniband Dependence on the Density of Ge/Si Quantum Dots for Solar Cell Application
2012/06/30 - IEEE Institute of Electrical and Electronics Engineers (IEEE) Senior Member
2010/10/19 - American Vacuum Society American Vacuum Society Plasma Prize For ground-breaking contributions to the development of innovative plasma sources
2010/09/14 - 社団法人応用物理学会 応用物理学会論文賞(JJAP論文賞) Two-Dimensional Si-Nanodisk Array Fabricated Using Bio-Nano-Process and Neutral Beam Etching for Realistic Quantum Effect Devices
2010/03/17 - 社団法人応用物理学会 プラズマエレクトロニクス賞 On-wafer monitoring of charge accumulation and sidewall conductivity in high-aspect-ratio contact holes during SiO2 etching process
2009/11/11 - American Vacuum Society American Vacuum Society Fellow Development of innovative plasma sources and damages free pulsed plasma processing techniques
