Development of techniques of Cu interconnect formation in LSI using plasma CVD
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論文 (400件):
Shoko Tsuboyama, Takamasa Okumura, Pankaj Attri, Kazunori Koga, Masaharu Shiratani, Kazuyuki Kuchitsu. Growth control of Marchantia polymorpha gemmae using nonthermal plasma irradiation. Scientific Reports. 2024. 14. 1
Susumu Toko, Takamasa Okumura, Kunihiro Kamataki, Kosuke Takenaka, Kazunori Koga, Masaharu Shiratani, Yuichi Setsuhara. Improving the efficiency of CO2 methanation using a combination of plasma and molecular sieves. Results in Surfaces and Interfaces. 2024. 100204-100204
Nanoblock Assembly Using Pulse RF Discharges with Amplitude Modulation (Industrial Plasma Technology: Applications from Environmental to Energy Technologies)
WILEY-VCH Verlag GmbH & Co 2010
Development of Method for Deposition of Super High Quality a-Si : H thin films at High Rate.
1999 - 2000
集積回路内銅配線形成に関する共同研究
Joint Research on
学歴 (4件):
- 1999 九州大学 総合理工学研究科 高エネルギー理工学
- 1999 九州大学
- 1994 九州大学 理学部 物理学
- 1994 九州大学
学位 (1件):
博士(理学) (九州大学)
経歴 (2件):
1999 - - 九州大学 助手
1999 - - Kyushu University, Research Associate.
委員歴 (39件):
2018/04 - 2022/03 応用物理学会 プラズマ・エレクトロニクス分科会 副幹事長
2020/04 - 2021/03 13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/ 14th International Conference on Plasma Nanotechnology and Science Program Committee
2020/04 - 2021/03 The 29th International Toki Conference on Plasma and Fusion Research Program Committee
2019/04 - 2021/03 九州大学 入試委員
2017/04 - 2021/03 応用物理学会 プログラム編集委員
2016/04 - 2021/03 Symposium on Plasma Physics and Technology Program Committee
2020/01 - 2020/12 DryProcessSymposium2020 論文委員
2019/01 - 2020/12 International Conference On Metallurgical Coatings & Thin Films Session Chair B2
2019/01 - 2020/12 Americal Vacuum Society, Plasma Science and Technology Division Program Committee
2016/04 - 2017/03 4th Japan-Korea Joint Symposium on Advance Solar Cells 2017 and International Symposium on Energy Research and Application 2017 Organizing Committee
2016/04 - 2017/03 DryProcessSymposium2016 論文委員
2015/04 - 2017/03 九州大学 遺伝子組み換え実験安全委員
2015/06 - 2016/06 27th Symposium on Plasma Physics and Technology, Czech Republic Programme committee member
2014/07 - International Conference of Microelectronics and Plasma Technology 2014 (ICMAP2014) ICMAP2014 Best Poster Presentation Award
2013/08 - The 9th Asian-European International Conference on Plasma Surface Engineering The 9th Asian-European International Conference of Plasma Surface Engineering(AEPSE2013)/ Outstanding Poster Award
2013/08 - International Conference of Microelectronics ans Plasma Technology 2014 (ICMAP2014) ICMAP2014 Best Poster Presentation Award
2013/07 - 12th International Symposium on Sputtering & Plasma Processes ISSP2013 Best Poster Award
2012/10 - 11th Asia Pacific Conference on Plasma Science adn Technology (APCPST) & 25th Symposium on Plasma Science for Materials (SPSM) Advanced Plasma Application Award
2012/09 - 日本MRS IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners"
2012/03 - ISPlasma2012 Best Presentation Award
2008/06 - Interfinish 2008 World Congress and Exposition Invited Presentation Award
American Vacuum Society
, 電気学会
, ブラズマ・核融合学会
, 応用物理学会
, 日本物理学会
, 日本生化学会
, 応用物理学会プラズマエレクトロニクス分科会
, American Vaccum Society
, Materials Research Society
, プラズマ・核融合学会