Development of techniques of Cu interconnect formation in LSI using plasma CVD
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論文 (414件):
Sukma Wahyu Fitriani, Takamasa Okumura, Kunihiro Kamataki, Kazunori Koga, Masaharu Shiratani, Pankaj Attri. Capture and Conversion of CO2 from Ambient Air Using Ionic Liquid-Plasma Combination. Plasma Chemistry and Plasma Processing. 2024
Marlis N. Agusutrisno, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita. Effect of nanoscale inhomogeneity on blocking temperature of ZnO:Co films fabricated by using nitrogen-mediated crystallization. MRS Advances. 2024
Marlis N. Agusutrisno, Sora Obinata, Takamasa Okumura, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Naoto Yamashita. Large-scale fabrication of thulium iron garnet film with perpendicular magnetic anisotropy using RF magnetron sputtering. Japanese Journal of Applied Physics. 2024. 63. 7. 07SP06-07SP06
Yoshiharu Wada, Wafaa Magdy, Keigo Takeda, Yuta Mido, Naoto Yamashita, Takamasa Okumura, Kunihiro Kamataki, Kazunori Koga, Masaru Hori, Masaharu Shiratani, et al. Sputtering deposition of dense and low-resistive amorphous In2O3: Sn films under ZONE-T conditions of Thornton's structural diagram. Applied Physics Letters. 2024. 124. 24
Kecheng Shen, Heping Shi, Kazunori Koga, Masaharu Shiratani, Toshiyuki Kawasaki. Effects of Supplied Gas on Plasma-Induced Liquid Flows. IEEE Transactions on Plasma Science. 2024. 52. 6. 2130-2136
Nanoblock Assembly Using Pulse RF Discharges with Amplitude Modulation (Industrial Plasma Technology: Applications from Environmental to Energy Technologies)
WILEY-VCH Verlag GmbH & Co 2010
Development of Method for Deposition of Super High Quality a-Si : H thin films at High Rate.
1999 - 2000
集積回路内銅配線形成に関する共同研究
Joint Research on
学歴 (4件):
- 1999 九州大学 総合理工学研究科 高エネルギー理工学
- 1999 九州大学
- 1994 九州大学 理学部 物理学
- 1994 九州大学
学位 (1件):
博士(理学) (九州大学)
経歴 (2件):
1999 - - 九州大学 助手
1999 - - Kyushu University, Research Associate.
委員歴 (39件):
2018/04 - 2022/03 応用物理学会 プラズマ・エレクトロニクス分科会 副幹事長
2020/04 - 2021/03 13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/ 14th International Conference on Plasma Nanotechnology and Science Program Committee
2020/04 - 2021/03 The 29th International Toki Conference on Plasma and Fusion Research Program Committee
2019/04 - 2021/03 九州大学 入試委員
2017/04 - 2021/03 応用物理学会 プログラム編集委員
2016/04 - 2021/03 Symposium on Plasma Physics and Technology Program Committee
2020/01 - 2020/12 DryProcessSymposium2020 論文委員
2019/01 - 2020/12 International Conference On Metallurgical Coatings & Thin Films Session Chair B2
2019/01 - 2020/12 Americal Vacuum Society, Plasma Science and Technology Division Program Committee
2016/04 - 2017/03 4th Japan-Korea Joint Symposium on Advance Solar Cells 2017 and International Symposium on Energy Research and Application 2017 Organizing Committee
2016/04 - 2017/03 DryProcessSymposium2016 論文委員
2015/04 - 2017/03 九州大学 遺伝子組み換え実験安全委員
2015/06 - 2016/06 27th Symposium on Plasma Physics and Technology, Czech Republic Programme committee member
2014/07 - International Conference of Microelectronics and Plasma Technology 2014 (ICMAP2014) ICMAP2014 Best Poster Presentation Award
2013/08 - The 9th Asian-European International Conference on Plasma Surface Engineering The 9th Asian-European International Conference of Plasma Surface Engineering(AEPSE2013)/ Outstanding Poster Award
2013/08 - International Conference of Microelectronics ans Plasma Technology 2014 (ICMAP2014) ICMAP2014 Best Poster Presentation Award
2013/07 - 12th International Symposium on Sputtering & Plasma Processes ISSP2013 Best Poster Award
2012/10 - 11th Asia Pacific Conference on Plasma Science adn Technology (APCPST) & 25th Symposium on Plasma Science for Materials (SPSM) Advanced Plasma Application Award
2012/09 - 日本MRS IUMRS-ICEM2012 "Young Scientist Awards: Silver Award Winners"
2012/03 - ISPlasma2012 Best Presentation Award
2008/06 - Interfinish 2008 World Congress and Exposition Invited Presentation Award
American Vacuum Society
, 電気学会
, ブラズマ・核融合学会
, 応用物理学会
, 日本物理学会
, 日本生化学会
, 応用物理学会プラズマエレクトロニクス分科会
, American Vaccum Society
, Materials Research Society
, プラズマ・核融合学会