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J-GLOBAL ID：200902129399276807   整理番号：93A0732367

Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System.

著者 (6件)： CRESSWELL M W (National Inst. Standards and Technology, Gaithersburg, MD, USA) ,  ALLEN R A (National Inst. Standards and Technology, Gaithersburg, MD, USA) ,  LINHOLM L W (National Inst. Standards and Technology, Gaithersburg, MD, USA) ,  ELLENWOOD C H (National Inst. Standards and Technology, Gaithersburg, MD, USA) ,  PENZES W B (National Inst. Standards and Technology, Gaithersburg, MD, USA) ,  TEAGUE E C (National Inst. Standards and Technology, Gaithersburg, MD, USA)
資料名： Proceedings. IEEE International Conference on Microelectronic Test Structures  (Proceedings. IEEE International Conference on Microelectronic Test Structures)
巻： 1993  ページ： 255-261  発行年： 1993年 
JST資料番号： T0991A  資料種別： 会議録 (C)
発行国： アメリカ合衆国 (USA)  言語： 英語 (EN)