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J-GLOBAL ID：201602270561566201   整理番号：13A1108361

Influence of different oxidants on the band alignment of HfO_2 films deposited by atomic layer deposition

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著者 (6件)：
Fan Jibin

Fan Jibin について

(School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ...)

School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ... について

, 
Liu Hongxia

Liu Hongxia について

(School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ...)

School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ... について

, 
Gao Bo

Gao Bo について

(School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ...)

School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ... について

, 
Ma Fei

Ma Fei について

(School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ...)

School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ... について

, 
Zhuo Qingqing

Zhuo Qingqing について

(School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ...)

School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ... について

, 
Hao Yue

Hao Yue について

(School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ...)

School of Microelectronics, Xidian Univ. Key Lab. of Wide Band-Gap Semiconductor Materials and Devices,Ministry of ... について


資料名：
Chinese Physics B  (Chinese Physics B)

Chinese Physics B について


巻： 21  号： 8  ページ： 087702-1-087702-5  発行年： 2012年 
JST資料番号： W1539A  ISSN： 1674-1056  資料種別： 逐次刊行物 (A)
発行国： 中国 (CHN)  言語： 英語 (EN)

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