Research field (2):
Electric/electronic material engineering
, Thin-film surfaces and interfaces
Research keywords (2):
薄膜 スパッタ プラズマ イオンビーム 励起粒子ビーム アシスト成膜
, thin films sputter plasma ion beam excited beam assisted deposition
日本真空学会
, The Vacuum Society of Japan
, The Surface Science Society of Japan
, The Japan Society of Applied Physics