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J-GLOBAL ID：200901099571151655   Update date: Jan. 30, 2024

Ito Yukihiro

イトウ ユキヒロ | Ito Yukihiro
Affiliation and department：
Tokyo Metropolitan College of Industrial Technology Department of Mechanical System Engineering

About Tokyo Metropolitan College of Industrial Technology Department of Mechanical System Engineering


Job title： Associate Professor
Research field  (1)： Manufacturing and production engineering
Research keywords  (8)： ガラス基板 ,  シリコンウェーハ ,  ナノ計測 ,  表面形状 ,  Glass substrate ,  Silicon wafer ,  Nano meter measurement ,  Surface shape measurement
Research theme for competitive and other funds  (4)：
  • 2021 - 2024 測定表面の法線ベクトル検出機能の付加による三角測量式光学センサの測定精度の向上
  • 2009 - 2010 電極上のアーク柱の滑りを利用した無消耗放電加工
  • 大面積・薄肉パネルを測定対象とした ナノ形状測定に関する研究
  • Study on shape measurement in nano meter order for thin-large panel
Papers (10)：
ｍore...
MISC (5)：
  • ITO Yukihiro, NATSU Wataru, KUNIEDA Masanori. D32 Effect of Anisotropy on Shape Measurement Accuracy of Silicon Wafer Using Three-Point-Support Inverting Method(Nano/micro measurement and intelligent instruments). Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21. 2009. 2009. 5. 781-786
  • ITO Yukihiro, NATSU Wataru, KUNIEDA Masanori. C36 Influence of Anisotropy of Silicon Wafer on Shape Measurement Accuracy. The ... Manufacturing & Machine Tool Conference. 2008. 2008. 7. 275-276
  • ITO Yukihiro, NATSU Wataru, KUNIEDA Masanori, MARUYA Noriyuki, IGUCHI Nobuaki. Accuracy estimation of shape measurement of thin-large panel with three-point-support inverting method(Nano/micro measurement and intelligent instrument). Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21. 2005. 2005. 2. 339-344
  • 青木祐一, 伊藤幸弘, 内山剛史, 川口和紀, 清水直茂, 徐 世傑, 丹道 匠, 三宅康仁, 茂木道宏. 飲料缶の物語-A Story of Can-前編. 精密工学会誌. 2004. 70. 1. 45-50
  • A Story of Can. Journal of the Japan Society of Precision Engineering. 2004. 70. 6. 771-774
Lectures and oral presentations  (40)：
  • 大口径シリコンウェーハの形状測定におけるセンサ原理に起因する誤差
    (2018年度精密工学会秋季大会学術講演会 2018)
  • 四点支持による大口径シリコンウェーハの反り形状測定精度の向上
    (2016年度精密工学会春季大会学術講演会 2016)
  • Investigation of Shape Measurement Method for Large-Diameter Silicon Wafer With Additional Support
    (The 14th euspen International Conference 2014)
  • 大口径シリコンウェーハの形状測定における非接触支持の検討
    (2013年度精密工学会秋季大会学術講演会 2013)
  • Simulation of Ring Blank Drawing by Finite Element Method
    (2012 International Conference on Manufacturing Science and Engineering 2012)
ｍore...
Education (4)：
  • 2004 - 2006 Tokyo University of Agriculture and Technology
  • - 2006 Tokyo University of Agriculture and Technology Graduate School, Division of Engineering Department of Mechanical Systems Engineering
  • 2002 - 2004 Tokyo University of Agriculture and Technology
  • 1997 - 2002 Tokyo University of Agriculture and Technology Faculty of Engineering
Professional career (1)：
  • Master(Engineering) (Tokyo University of Agriculture and Technology)
Work history (6)：
  • 2016/04 - 現在 Tokyo Metropolitan College of Industrial Technology Monozukuri Department
  • 2012/04 - 2016/03 Tokyo Metropolitan College of Industrial Technology Monozukuri Department
  • 2012/02 - 2012/03 Tokyo University of Agriculture and Technology
  • 2010/04 - 2012/01 Tokyo University of Agriculture and Technology
  • 2006/04 - 2010/03 Tokyo University of Agriculture and Technology Institute of Symbiotic Science and Technology
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Awards (3)：
  • 2017/04 - 日本機械学会 2016年度教育賞
  • 2008/03 - 精密工学会 ベストプレゼンテーション賞
  • 2004 - 精密工学会 2004年Best Article Award
Association Membership(s) (6)：
日本機械学会 ,  電気加工学会 ,  精密工学会 ,  The Japan Society of Mechanical Engineering ,  The Japan Society of Electrical Machining Engineers ,  The Japan Society for Precision Engineering
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