Art
J-GLOBAL ID:201702220535261283   Reference number:17A1110680

Warp Measurement for Large-Diameter Silicon Wafer Using Four-Point-Support Inverting Method

4点支持反転法を使用した大口径シリコンウエハに対する反り測定
Author (2):
Material:
Volume: 11  Issue:Page: 721-727  Publication year: Sep. 05, 2017 
JST Material Number: L0997B  ISSN: 1881-7629  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

JST classification (1):
JST classification
Category name(code) classified by JST.
General 
Reference (11):
more...
Terms in the title (5):
Terms in the title
Keywords automatically extracted from the title.

Return to Previous Page