Rchr
J-GLOBAL ID：200901027324664037
Update date: Jul. 02, 2022
Ikehara Tsuyoshi
イケハラ ツヨシ | Ikehara Tsuyoshi
Affiliation and department：
National Institute of Advanced Industrial Science and Technology
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Job title：
Researcher
Homepage URL (1)：
http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=T85247657
Research field (5)：
Machine elements and tribology
, Design engineering
, Machine materials and mechanics
, Nano/micro-systems
, Nanomaterials
Research keywords (2)：
MEMS 設計 疲労 シリコン センサ
, MEMS
Research theme for competitive and other funds (2)：
MEMS
MEMS
MISC (18)：
Y Zhang, J Gwak, Y Murakoshi, T Ikehara, R Maeda, C Nishimura. Hydrogen permeation characteristics of thin Pd membrane prepared by microfabrication technology. JOURNAL OF MEMBRANE SCIENCE. 2006. 277. 1-2. 203-209
Y Zhang, J Lu, T Ikehara, R Maeda, C Nishimura. Characterization and permeation of microfabricated palladium membrane. MATERIALS TRANSACTIONS. 2006. 47. 2. 255-258
LU Jian, IKEHARA Tsuyoshi, ZHANG Yi, MAEDA Ryutaro, MIHARA Takashi. Energy Dissipation Mechanisms in PZT Thin Film Transduced Micro Cantilevers. JAPANESE JOURNAL OF APPLIED PHYSICS. 2006. 45. 11. 8795-8800
T Ikehara, R Maeda. Fabrication of an accurately vertical sidewall for optical switch applications using deep RIE and photoresist spray coating. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. 2005. 12. 1-2. 98-103
XC Shan, T Ikehara, Y Murakoshi, R Maeda. Applications of micro hot embossing for optical switch formation. SENSORS AND ACTUATORS A-PHYSICAL. 2005. 119. 2. 433-440
ｍore...
Association Membership(s) (3)：
IEEE
, 日本機械学会
, 電気学会
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