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J-GLOBAL ID：200902287711917186   Reference number：06A0385692

Hydrogen permeation characteristics of thin Pd membrane prepared by microfabrication technology

微細加工技術で作成したPd薄膜の水素透過特性

Author (6)： ZHANG Y. (MEMS and Packaging Group, Advanced Manufacturing Res. Inst., National Inst. of Advanced Industrial Sci. and Technol. ...) ,  GWAK J. (Ecomaterials Center, National Inst. for Materials Sci., Sengen 1-2-1, Tsukuba, Ibaraki 305-0047, JPN) ,  MURAKOSHI Y. (MEMS and Packaging Group, Advanced Manufacturing Res. Inst., National Inst. of Advanced Industrial Sci. and Technol. ...) ,  IKEHARA T. (MEMS and Packaging Group, Advanced Manufacturing Res. Inst., National Inst. of Advanced Industrial Sci. and Technol. ...) ,  MAEDA R. (MEMS and Packaging Group, Advanced Manufacturing Res. Inst., National Inst. of Advanced Industrial Sci. and Technol. ...) ,  NISHIMURA C. (Ecomaterials Center, National Inst. for Materials Sci., Sengen 1-2-1, Tsukuba, Ibaraki 305-0047, JPN)
Material： Journal of Membrane Science  (J Membr Sci)
Volume： 277  Issue： 1-2  Page： 203-209  Publication year： Jun. 01, 2006 
JST Material Number： E0669A  ISSN： 0376-7388  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： membrane separation ,...
Semi thesaurus term： grain growth

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JST classification (1)： Membrane separation  (XD02120Z)

Terms in the title (4)： 微細加工技術 ,  Pd ,  薄膜 ,  水素透過