Research field (2)：
Electric/electronic material engineering
, Thin-film surfaces and interfaces
Research theme for competitive and other funds (4)：
プラズマの計測と制御
機能薄膜の低温かつ高速成膜
Diagnostics and controle of plasma
Low temperature and high-rate deposition of functional materials
Papers (80)：
Hiroaki Kakiuchi, Hiromasa Ohmi, Kiyoshi Yasutake. Pulsed very high-frequency plasma-enhanced chemical vapor deposition of silicon films for low-temperature (120 °C) thin film transistors. Journal of Physics D: Applied Physics. 2020. 53. 41. 415201-415201
Kakiuchi Hiroaki, Ohmi Hiromasa, Yasutake Kiyoshi. Controllability of structural and electrical properties of silicon films grown in atmospheric-pressure very high-frequency plasma. JOURNAL OF PHYSICS D-APPLIED PHYSICS. 2018. 51. 35
Takei Norihisa, Shinoda Fumiya, Kakiuchi Hiroaki, Yasutake Kiyoshi, Ohmi Hiromasa. On-site SiH4 generator using hydrogen plasma generated in slit-type narrow gap. JOURNAL OF PHYSICS D-APPLIED PHYSICS. 2018. 51. 24
High-rate deposition of amorphous silicon films by atmospheric pressure plasma chemical vapor deposition
Crystal Growth Technology, Edited by H. J. Scheel and T. Fukuda, John Wiley & Sons Ltd 2003
Plasma CVM (Chemical Vapor Machining) - A Chemical Machining Method with Equal Performance to Conventional Mechanical Methods from the sence of Removal Rates and Spatial Resolutions
Proceedings of the 7th International Precision Engineering Seminar. 1993
Low Temperature Growth of Polycrystalline Silicon Films by Plasma Chemical Vapor Deposition under Higher Pressure than Atmospheric Pressure
Proceedings of the 7th International Precision Engineering Seminar. 1993
Works (4)：
グローバルCOE 高機能化原子制御製造プロセス教育研究拠点
2008 -
Center of Excellence for Atomically Controlled Fabrication Technology
2008 -
原子論的生産技術の創出拠点
2004 -
原子論的生産技術の創出拠点
2004 -
Education (4)：
- 1991 Osaka University
- 1991 Osaka University
- 1989 Osaka University
- 1989 Osaka University Department of Precision Engineering
Professional career (2)：
master of Engineering (Osaka University)
Doctor of Engineering (Osaka University)
Work history (4)：
1991 - 2001 Osaka University
1991 - 2001 Osaka University, Research Associate
2001 - - 大阪大学 助教授
2001 - - Osaka University, Associate Proffesor
Awards (1)：
1994 - 1994年度精密工学会 関西支部講演論文賞
Association Membership(s) (2)：
The Japan Society of Applied Physics
, The Japan Society for Precision Engineering
