Nakano Takeo

ナカノタケオ | Nakano Takeo

Affiliation and department：
Job title： Professor
Homepage URL (1)： http://surf.ml.seikei.ac.jp/~nakano/

Research field (2)： Applied physics - general , Thin-film surfaces and interfaces

Research keywords (3)： Thin Film Fabrication Processes , Sputtering , Thin Film Properties

Research theme for competitive and other funds (12)：

2017 - 2020 デュアルターゲット型大電力パルススパッタによるプラズマ電位と薄膜構造の制御
2012 - 2014 Film structure modification using high power pulsed magnetron sputtering with target voltage control during pulse-off period
2009 - 2011 Reactive Sputtering of Oxygen-Free Metal Nitride Films : Oxygen Incorporation and Effect on Electrical Properties
2007 - 2009 Study on the modeling of reactive sputter deposition including the transport process of sputtered and gas particles
1999 - 2000 高圧環境下のスパッタリング製膜過程におけるシミュレーションモデルの開発

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Papers (43)：

Takeo Nakano, Kosuke Kimura, Yuto Iijima, Masato Takeuchi, Kei Oya, Masayoshi Nagao, Hisashi Ohsaki. Linear Relationship between Reactive Gas Flow Rate and Target Power at Mode Transitions in Reactive Sputtering. e-Journal of Surface Science and Nanotechnology. 2024. 22. 3. 199-206
Md. Suruz Mian, Takeo Nakano, Kunio Okimura. Improvement of the uniformity of structural and electrical properties of transparent conductive Al-doped ZnO thin films by inductively coupled plasma-assisted radio frequency magnetron sputtering. Thin Solid Films. 2023. 769. 139752-139752
Md. Suruz Mian, Riko Yagi, Kei Oya, Takeo Nakano. Coloring and Bleaching Properties of 500-1000 nm-Thick Electrochromic Tungsten Oxide Films Deposited by Reactive Direct Current Magnetron Sputtering. physica status solidi (a). 2021. 2100646-2100646
Naohiro SHIMODA, Nao KOIDE, Tetsuo HONMA, Takeo NAKANO, Jin ZHANG, Hidenobu WAKITA, Shigeo SATOKAWA. Local Structure Analysis of Active Sites in NiO/γ-Al₂O₃ Catalyst for Dimethyl Sulfide Decomposition: Sulfurization Behavior of Ni Species Using X-ray Absorption Spectroscopy Analysis. Journal of the Japan Petroleum Institute. 2020. 63. 6. 365-374
Katsuya Iuchi, Kei Oya, Kazuki Hosoya, Kazuki Sasaki, Yuko Sakurada, Takeo Nakano, Hisashi Hisatomi. Different morphologies of human embryonic kidney 293T cells in various types of culture dishes. Cytotechnology. 2020. 72. 1. 131-140

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MISC (32)：

Hiromasa Murata, Shun Kondo, Md. Suruz Mian, Katsuhisa Murakami, Takeo Nakano, Masayoshi Nagao. HfN and Hf Spindt-Type FEA Fabrication Using Triode Reactive High Power Pulsed Magnetron Sputtering. 2024 37th International Vacuum Nanoelectronics Conference (IVNC). 2024. 1-2
Takeo NAKANO, Fumio KOMORI, Katsuyuki FUKUTANI, Yasunori TANIMOTO. Report on the 9th Vacuum and Surface Science Conference of Asia and Australia (VASSCAA-9) and on the Co-located Meetings of VASSCAA-ISC and IUVSTA-ECM. Vacuum and Surface Science. 2019. 62. 1. 48-50
Hyuga Taniguchi, Kei Oya, Takeo Nakano, Masayoshi Nagao, Hisashi Ohsaki, Katsuhisa Murakami. Effects of discharge gas species (Ar, Kr) on fabrication of Spindt type emitter cathode using high power pulsed magnetron sputtering. EICE technical report. 2018. 118. 263. 5-8
Takeo NAKANO. Report on the 155^th Seminar of VSJ Sputtering and Plasma Process Research Division “Proton Movement in Solid Materials and Films”. Vacuum and Surface Science. 2018. 61. 2. 102-102
Modification of Microstructure of Metal Films using High Power Pulsed Magnetron Sputtering. 2017. 38. 5. 228-233

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Books (9)：

真空科学ハンドブック
コロナ社 2018 ISBN:9784339009088
ドライプロセスによる表面処理・薄膜形成の基礎
コロナ社 2013 ISBN:9784339046311
ロールtoロール技術の最新動向
シーエムシー出版 2011 ISBN:9784781303215
スパッタ実務[Q&A集]
技術情報協会 2009 ISBN:9784861042768
薄膜ハンドブック(第2版)
オーム社 2008 ISBN:9784274205194

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Lectures and oral presentations (11)：

Application of triode HPPMS for fabrication of Spindt-type micro vacuum electron emitter array
(HiPIMS Today 2024 2024)
Effects of discharge gas species (Ar, Kr) on fabrication of Spindt type emitter cathode using high power pulsed magnetron sputtering
(IEICE technical report. Electron devices 2018)
Universality of mode transition condition and prediction of film properties in reactive sputtering
(Abstract of annual meeting of the Surface Science of Japan 2016)
Sputter deposition of Zr-V-Fe (St707) alloy films for Non-Evaporable-Getter (NEG) pump applications
(Abstract of annual meeting of the Surface Science of Japan 2016)
Surface characterization and cellular adhesiveness of titanium oxide thin film deposited via reactive sputtering
(Abstract of annual meeting of the Surface Science of Japan 2016)

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Education (2)：

1989 - 1991 The University of Tokyo The Graduate School of Engineering Department of Applied Physics
1985 - 1989 The University of Tokyo The Faculty of Engineering Department of Applied Physics

Professional career (1)：

Doctor Engineering (The University of Tokyo)

Committee career (8)：

2024/04 - 現在 SP div., Japan Society of Vacuum and Surface Science Chair
2020 - 現在 The Japan Society of Vacuum and Surface Science Fellow
2018/04 - 現在日本表面真空学会電子ジャーナル委員会
2010 - 現在日本表面真空学会教育委員会
2018/04 - 2022/03 日本表面真空学会 SP 部会副部会長

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Awards (3)：

2015/12 - The Vacuum Society of Japan Poster Award at 56th annual meeting of the Vacuum Society of Japan
2013 - 日本真空学会スパッタリングおよびプラズマプロセス技術部会部会賞
1998 - 第5回(1998年秋季)応用物理学会講演奨励賞

Association Membership(s) (6)：

The Surface Finishing Society of Japan , IEEE , The Institute of Electrical Engineers of Japan , The Japan Society of Vacuum and Surface Science , AVS , The Japan Society of Applied Physics

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