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J-GLOBAL ID：200901048314885741   Update date: Apr. 04, 2024

Nakano Takeo

ナカノ タケオ | Nakano Takeo
Affiliation and department：
Seikei University Faculty of Science and Technology Department of Science and Technology

About Seikei University Faculty of Science and Technology Department of Science and Technology


Job title： Professor
Homepage URL  (1)： http://surf.ml.seikei.ac.jp/~nakano/
Research field  (2)： Applied physics - general ,  Thin-film surfaces and interfaces
Research keywords  (3)： Thin Film Fabrication Processes ,  Sputtering ,  Thin Film Properties
Research theme for competitive and other funds  (12)：
  • 2017 - 2020 デュアルターゲット型大電力パルススパッタによるプラズマ電位と薄膜構造の制御
  • 2012 - 2014 Film structure modification using high power pulsed magnetron sputtering with target voltage control during pulse-off period
  • 2009 - 2011 Reactive Sputtering of Oxygen-Free Metal Nitride Films : Oxygen Incorporation and Effect on Electrical Properties
  • 2007 - 2009 Study on the modeling of reactive sputter deposition including the transport process of sputtered and gas particles
  • 1999 - 2000 高圧環境下のスパッタリング製膜過程におけるシミュレーションモデルの開発
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Papers (43)：
  • Takeo Nakano, Kosuke Kimura, Yuto Iijima, Masato Takeuchi, Kei Oya, Masayoshi Nagao, Hisashi Ohsaki. Linear Relationship between Reactive Gas Flow Rate and Target Power at Mode Transitions in Reactive Sputtering. e-Journal of Surface Science and Nanotechnology. 2024
  • Md. Suruz Mian, Takeo Nakano, Kunio Okimura. Improvement of the uniformity of structural and electrical properties of transparent conductive Al-doped ZnO thin films by inductively coupled plasma-assisted radio frequency magnetron sputtering. Thin Solid Films. 2023. 769. 139752-139752
  • Md. Suruz Mian, Riko Yagi, Kei Oya, Takeo Nakano. Coloring and Bleaching Properties of 500-1000 nm-Thick Electrochromic Tungsten Oxide Films Deposited by Reactive Direct Current Magnetron Sputtering. physica status solidi (a). 2021. 2100646-2100646
  • Naohiro SHIMODA, Nao KOIDE, Tetsuo HONMA, Takeo NAKANO, Jin ZHANG, Hidenobu WAKITA, Shigeo SATOKAWA. Local Structure Analysis of Active Sites in NiO/γ-Al2O3 Catalyst for Dimethyl Sulfide Decomposition: Sulfurization Behavior of Ni Species Using X-ray Absorption Spectroscopy Analysis. Journal of the Japan Petroleum Institute. 2020. 63. 6. 365-374
  • Katsuya Iuchi, Kei Oya, Kazuki Hosoya, Kazuki Sasaki, Yuko Sakurada, Takeo Nakano, Hisashi Hisatomi. Different morphologies of human embryonic kidney 293T cells in various types of culture dishes. Cytotechnology. 2020. 72. 1. 131-140
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MISC (31)：
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Books (9)：
  • 真空科学ハンドブック
    コロナ社 2018 ISBN:9784339009088
  • ドライプロセスによる表面処理・薄膜形成の基礎
    コロナ社 2013 ISBN:9784339046311
  • ロールtoロール技術の最新動向
    シーエムシー出版 2011 ISBN:9784781303215
  • スパッタ実務[Q&A集]
    技術情報協会 2009 ISBN:9784861042768
  • 薄膜ハンドブック(第2版)
    オーム社 2008 ISBN:9784274205194
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Lectures and oral presentations  (10)：
  • Effects of discharge gas species (Ar, Kr) on fabrication of Spindt type emitter cathode using high power pulsed magnetron sputtering
    (IEICE technical report. Electron devices 2018)
  • Universality of mode transition condition and prediction of film properties in reactive sputtering
    (Abstract of annual meeting of the Surface Science of Japan 2016)
  • Sputter deposition of Zr-V-Fe (St707) alloy films for Non-Evaporable-Getter (NEG) pump applications
    (Abstract of annual meeting of the Surface Science of Japan 2016)
  • Surface characterization and cellular adhesiveness of titanium oxide thin film deposited via reactive sputtering
    (Abstract of annual meeting of the Surface Science of Japan 2016)
  • Electrochromic properties of reactive sputtered tungsten oxide flims.
    (Abstract of annual meeting of the Surface Science of Japan 2016)
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Education (2)：
  • 1989 - 1991 The University of Tokyo The Graduate School of Engineering Department of Applied Physics
  • 1985 - 1989 The University of Tokyo The Faculty of Engineering Department of Applied Physics
Professional career (1)：
  • Doctor Engineering (The University of Tokyo)
Committee career (7)：
  • 2020 - 現在 The Japan Society of Vacuum and Surface Science Fellow
  • 2018/04 - 現在 日本表面真空学会 電子ジャーナル委員会
  • 2018/04 - 現在 日本表面真空学会 SP 部会 副部会長
  • 2010 - 現在 日本表面真空学会 教育委員会
  • 2010 - 2015 電気学会 高密度金属プラズマ 調査専門委員会 幹事
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Awards (3)：
  • 2015/12 - The Vacuum Society of Japan Poster Award at 56th annual meeting of the Vacuum Society of Japan
  • 2013 - 日本真空学会スパッタリングおよびプラズマプロセス技術部会 部会賞
  • 1998 - 第5回(1998年秋季)応用物理学会講演奨励賞
Association Membership(s) (6)：
The Surface Finishing Society of Japan ,  IEEE ,  The Institute of Electrical Engineers of Japan ,  The Japan Society of Vacuum and Surface Science ,  AVS ,  The Japan Society of Applied Physics
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