Research theme for competitive and other funds (6):
薄膜界面の力学物性
プラズマ処理およびスパッタリング
薄膜の形成技術および物性
Mechanical Properties of Thin Film Interfaces
Plasma Processing and Sputtering
Structure and Properties of Thin Films
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MISC (22):
S.Baba, Y.Yamaguchi, M.Ogawa, T.Nakano. Two critical events observed on Cu films on glass substrate in the micro-scratch test. Adhesion Aspects of Thin Films. 2005. 2. 203-213