Research field (1):
Manufacturing and production engineering
Research keywords (3):
AFM
, 高アスペクト比微細形状
, ナノ計測
Research theme for competitive and other funds (1):
2002 - 大面積高アスペクト比微細形状のナノ計測
MISC (8):
Design and Construct of a High-Precision and Long-Stroke AFM Probe-Unit Integrated with a Linear Encoder. Nanotechnology and Precision Engineering. 2005. 3. 1. 1-7
Design and Construct of a High-Precision and Long-Stroke AFM Probe-Unit Integrated with a Linear Encoder. Nanotechnology and Precision Engineering. 2005. 3. 1. 1-7
A Precision AFM Probe-Unit for Measurement of High Aspect Ratio Micro-Structured Surfaces. Proceeding of 4th euspen International Conference. 2004. ,254-255