Research field (1)：
Electronic devices and equipment
Research keywords (1)：
Integrated circuit
Research theme for competitive and other funds (29)：
2016 - 2020 Creation of swarm intelligence silicon and deployment to IoT sensor networks
2015 - 2018 Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal Structure
2012 - 2015 A Study on Highly Efficient Energy Harvesting Circuits and Systems
2011 - 2014 The study on human monitoring chip and multi-physics simulation technology
2009 - 2012 Investigation of True Scalable CMOS Integrated Circuit
2006 - 2010 Technology Evolution for Silicon Nano-Electronics
2006 - 2009 Signal Integrity of Nano-Scale interconnect and Circuit
2004 - 2007 Development of On-chip Nano-Scale Network Based on Communication Theory
2004 - 2006 The research of multilayer active array electrode for neuron activity in Brain
2005 - 2005 シリコンナノエレクトロニクスの新展開-ポストスケーリングテクノロジー
2002 - 2004 Development of in-vivo pH Measurement Chip in Digestive System
2000 - 2004 超機能化グローバル・インターフェース・インテグレーション研究
2002 - 2003 マイクロメカニクス技術を用いたGHz帯可変インダクタの開発
2001 - 2003 Investigation of in vivo Wireless Communication Chip
2001 - 2003 超高速マイクロ構造伝送配線の開発とRF駆動回路の研究
2001 - 2002 GHz Electromigration Endurance Evaluation of ULSI Interconnect
1999 - 2001 Research of Combination RF/Analog/Digital Global Integration technology
1996 - 1999 ULTRA-LOW-POWER SILICON LSI DESIGN BASED ON Eb/No-BER CHARACTERISTICS
1996 - 1998 DEVELOPMENT OF AL-CVD CLUSTER TOOL FOR ULSI MULTILEVEL INTERCONNECTION
1996 - 1998 STUDY OF ULTRA-HIGH-SPEED CMOS USING FULLY SELF-ALIGNED METALLIZATION
1993 - 1995 DEVELOPMENT OF SINGLE-ELECTRON-TRANSISTOR
1990 - 1993 DEVELOPMENT OF HIGHLY-RELIABLE SPREAD-SPECTRUM WIRELESS MODEM
1990 - 1990 反応性水素プラズマによる選択励起有機金属を用いたAl選択成長の研究
1987 - 1990 "Investigation of Cold Electronics Semiconductor LSI"
1988 - 1988 有機金属用弱励起プラズマによるAl CVDの表面反応制御の研究
1988 - 1988 ワイドギャップ窒化アルミニウム薄膜結晶成長とその制御
Global Integration Technology
High Speed Signal Processing ULSI
GHz Multilevel Interconnect
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Papers (291)：
Taro Omura, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression. Surface and Coatings Technology. 2022. 436. 128315-128315
Akihiro Uchiyama, Takashi Ichikawa, Kohei Shibata, Shin-Ichi Iida, Sangyeop Lee, Noboru Ishihara, Katsuyuki MacHida, Kazuya Masu, Hiroyuki Ito. A MEMS ACCELEROMETER with A SINGLE AXIS TWO PROOF MASSES for A WIDE DETECTION RANGE. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. 2021. 112-115
Hitomi Watanabe, Tso-Fu Mark Chang, Michael Schneider, Ulrich Schmid, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, et al. Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem. 2021
Takashi Ichikawa, Akihiro Uchiyama, Kohei Shibata, Shinichi Iida, Sangyeop Lee, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu, Hiroyuki Ito. A 3-D Capacitive-Detection Electrode for a Single Gold Proof-Mass Three-Axis MEMS Accelerometer. INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. 2021
2015 - The Institute of Electronics, Information and Communication Engineers Fellow
2013/05 - The Institute of Electronics, Information and Communication Engineers Achievement Award Leading Research on Scalable Wideband RF CMOS Integrated Circuits
2013 - The Institute of of Electrical Engineers of Japan フェロー
2010/10 - The Institute of Electorical Engineers of Japan 社団法人電気学会上級会員
2009/09 - Japan Society of Applied Physics Fellow
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Association Membership(s) (4)：
The Japan Society of Applied Physics
, The Institute of Electronics, Information and Communication Engineers
, The Institute of Electrical Engineers of Japan
, IEEE(The Institute of Electrical and Electronics Engineers)
