Art

J-GLOBAL ID：201802263896924382   Reference number：18A0458273

A 0.18-μm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers

サブ1mGのMEMS加速度センサのための0.18μm CMOS時間領域容量-センサインタフェイス

Author (9)： Takayasu Motohiro (Tokyo Institute of Technology) ,  Dosho Shiro (Tokyo Institute of Technology) ,  Ito Hiroyuki (Tokyo Institute of Technology) ,  Yamane Daisuke (Tokyo Institute of Technology) ,  Konishi Toshifumi (Tokyo Institute of Technology) ,  Konishi Toshifumi (NTT Advanced Technology Co.) ,  Machida Katsuyuki (Tokyo Institute of Technology) ,  Ishihara Noboru (Tokyo Institute of Technology) ,  Masu Kazuya (Tokyo Institute of Technology)
Material： IEICE Electronics Express (Web)  (IEICE Electron Express (Web))
Volume： 15  Issue： 2  Page： 20171227(J-STAGE)  Publication year： 2018 
JST Material Number： U0039A  ISSN： 1349-2543  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *MEMS ,  *accelerometer ,  complementary metal oxide semiconductor ,  relaxation oscillation ,  signal characteristic ,  *MEMS accelerometer ,  time domain
Semi thesaurus term： relaxation oscillators

Author keywords (6)： time domain ,  capacitive-sensor interface ,  relaxation oscillator ,  sub-1mG ,  microelectromechanical systems (MEMS) ,  accelerometer

JST classification (1)： Measuring methods and instruments of time,speed,acceleration,angular veloc?  (AD05040K)

Reference (21)：

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• [2] N. Yazdiet al.: “Micromachined inertial sensors,” Proc. IEEE 86 (1998) 1640 (DOI: 10.1109/5.704269).
• [3] G. Krishnanet al.: “Micromachined high-resolution accelerometers,” J. Indian Inst. Sci. 87 (2007) 333.
• [4] V. Biefeld, et al.: “Implantable low-g accelerometer for the telemetric monitoring of micro-movements in fracture zones,” Proc. 1st Annu. Int. IEEE-EMBS Special Topic Conf. Microtechnologies in Medicine and Biology (2000) 497 (DOI: 10.1109/MMB.2000.893834).
• [5] B. E. Boser and R. T. Howe: “Surface micromachined accelerometers,” IEEE J. Solid-State Circuits 31 (1996) 366 (DOI: 10.1109/4.494198).

Terms in the title (5)： サブ ,  MEMS加速度センサ ,  CMOS ,  時間領域 ,  センサインタフェイス