Art

J-GLOBAL ID：200902001817593532   Reference number：91A0792544

Measurement of Fine Surface Profile with Two-wavelength Phase-shift Interferometry.

二波長位相シフト干渉法による微細表面形状計測

Author (3)： NISHIKAWA TAKAYUKI (大阪府大 工) ,  TAKAYASU TAKURO (大阪府大 工) ,  IWATA KOICHI (大阪府大 工)
Material： 精密工学会誌  (Journal of the Japan Society for Precision Engineering)
Volume： 57  Issue： 9  Page： 1633-1638  Publication year： Sep. 1991 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： wavelength ,...

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JST classification (1)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O)

Reference (7)：

• 1) J.H Bruning et al : Digital Wavefront Measurement Interferometer for Testing Optical Surfaces and Lenses, APPL. OPT., 13, (1974) 2693.
• 2) J.H.Bruning : Fringe Scaning Interferometer Optical Shop Testing, D.Malacara ed, Wiley, New York, (1978) 409.
• 3) J.Schwider et al : Digital Wave-front Measuring Interferometry : Some Systematic Error Souces, APPL. OPT., 22, (1983) 3421.
• 4) Katherine Creath, Yeou-Yen Cheng and J.C. Wyant : Contouring Aspheric Surface Using Two-wavelength Phase-shifting Interferometry, Optica Acta, 32, (1985) 1455.
• 5) K.Creath : Step Height Measurement Using Two-wavelength Phase-shifting Interferometry, APPL. OPT., 26, (1987) 2810.

Terms in the title (4)： 波長 ,  位相シフト干渉法 ,  表面形状 ,  計測