Characteristics of a Monodisperse PHS-Based Positive Resist (MDPR) in KrF Excimer Laser Lithography.

KAWAI Y; TANAKA A; MATSUDA T

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J-GLOBAL ID：200902002100269494 Reference number：93A0168636

Characteristics of a Monodisperse PHS-Based Positive Resist (MDPR) in KrF Excimer Laser Lithography.

KrFエキシマレーザリソグラフィーにおける単分散PHS系ポジ型レジスト(MDPR)の特性

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Material：
Volume： 31 Issue： 12B Page： 4316-4320 Publication year： Dec. 1992
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Country of issue： Japan (JPN) Language： ENGLISH (EN)

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