rf-Plasma deposited amorphous hydrogenated hard carbon thin films:  Preparation, properties, and applications.

BUBENZER A; DISCHLER B; BRANDT G; KOIDL P

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J-GLOBAL ID：200902003471824438 Reference number：84A0273339

rf-Plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications.

高周波プラズマ蒸着による非晶質水素化硬質炭素薄膜作製,特性および応用

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Material：
Volume： 54 Issue： 8 Page： 4590-4595 Publication year： Aug. 1983
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Optical properties of condensed matter in general

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