Art
J-GLOBAL ID：200902004571830628   Reference number：90A0606329

Prototype micro-valve actuator.

原型のマイクロバルブアクチュエータ
Author (2)：
BUSCH J D

About BUSCH J D

(TiNi Alloy Co., CA)

About TiNi Alloy Co., CA

, 
JOHNSON A D

About JOHNSON A D

(TiNi Alloy Co., CA)

About TiNi Alloy Co., CA


Material：
Proceedings. IEEE Micro Electro Mechanical Systems, 1990  (Proc IEEE Micro Electro Mech Syst 1990)

About Proceedings. IEEE Micro Electro Mechanical Systems, 1990


Page： 40-41  Publication year： 1990 
JST Material Number： K19900617  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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actuator

About actuator

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Piping fittings,valves 
(QD05020E)

About Piping fittings,valves

,  Other metallography 
(WB01040Y)

About Other metallography

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
原型

About 原型

, 
マイクロ

About マイクロ

, 
バルブアクチュエータ

About バルブアクチュエータ


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