Art
J-GLOBAL ID：200902004975484170   Reference number：84A0287697

Metal film removal and patterning using a XeCl laser.

XeClレーザを用いた金属膜の除去とパターン形成
Author (4)：
ANDREW J E

About ANDREW J E

(Univ. Hull, United Kingdom)

About Univ. Hull, United Kingdom

, 
DYER P E

About DYER P E

(Univ. Hull, United Kingdom)

About Univ. Hull, United Kingdom

, 
GREENOUGH R D

About GREENOUGH R D

(Univ. Hull, United Kingdom)

About Univ. Hull, United Kingdom

, 
KEY P H

About KEY P H

(Univ. Hull, United Kingdom)

About Univ. Hull, United Kingdom


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 43  Issue： 11  Page： 1076-1078  Publication year： Dec. 01, 1983 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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metallic thin film

About metallic thin film

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages 
(BK16040S)

About Laser irradiation effects and damages

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
レーザ

About レーザ

, 
金属膜

About 金属膜

, 
パターン形成

About パターン形成


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