Art
J-GLOBAL ID：200902006484173842
Reference number：85A0056754
Modeling of defects in integrated circuit photolithographic patterns.
ICのフォトリソグラフィパタンにおける欠陥のモデル化
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Author (1)：
Material：
Volume：
28
Issue：
4
Page：
461-475
Publication year：
Jul. 1984
JST Material Number：
D0061B
ISSN：
0018-8646
CODEN：
IBMJAE
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices
, General
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