Art
J-GLOBAL ID：200902010798041247   Reference number：83A0384806

Surface segregation during alloy sputtering and implantation.

合金スパッタリングと注入による表面偏析
Author (4)：
ANDERSEN H H

About ANDERSEN H H

(Univ. Aarhus, Denmark)

About Univ. Aarhus, Denmark

, 
STENUM B

About STENUM B

(Univ. Aarhus, Denmark)

About Univ. Aarhus, Denmark

, 
SO RENSEN T

About SO RENSEN T

(Univ. Aarhus, Denmark)

About Univ. Aarhus, Denmark

, 
WHITLOW H J

About WHITLOW H J

(Univ. Aarhus, Denmark)

About Univ. Aarhus, Denmark


Material：
Nuclear Instruments & Methods in Physics Research  (Nucl Instrum Methods Phys Res)

About Nuclear Instruments & Methods in Physics Research


Volume： 209/210  Issue： Pt 1  Page： 487-494  Publication year： May. 01, 1983 
JST Material Number： D0208A  ISSN： 0029-554X  CODEN： NIMRD9  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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segregation(concentration distribution)

About segregation(concentration distribution)

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Sputtering 
(BK16110U)

About Sputtering

,  Lattice defects in metals 
(BK12030F)

About Lattice defects in metals

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
合金

About 合金

, 
スパッタリング

About スパッタリング

, 
注入

About 注入

, 
表面偏析

About 表面偏析


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