Art
J-GLOBAL ID：200902012150841437
Reference number：88A0347226
Electron beam evaporation and D.C. magnetron sputtering in roll coating.
ロールコーティングにおける電子ビーム(EB)蒸着とD.C.マグネトロンスパッタリング
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Author (1)：
Material：
Volume：
30th
Page：
91-104,104(1)
Publication year：
1987
JST Material Number：
E0063B
ISSN：
0737-5921
Document type：
Proceedings
Article type：
解説
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition
, Vapor plating
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