Art
J-GLOBAL ID：200902012569317088   Reference number：83A0163931

Ion beam sputter-deposited diamondlike films.

イオンビームスパッタ蒸着ダイヤモンド様薄膜
Author (2)：
BANKS B A

About BANKS B A

(Lewis Research Center National Aeronautics and Space Administration, Ohio)

About Lewis Research Center National Aeronautics and Space Administration, Ohio

, 
RUTLEDGE S K

About RUTLEDGE S K

(Lewis Research Center National Aeronautics and Space Administration, Ohio)

About Lewis Research Center National Aeronautics and Space Administration, Ohio


Material：
Journal of Vacuum Science & Technology  (J Vac Sci Technol)

About Journal of Vacuum Science & Technology


Volume： 21  Issue： 3  Page： 807-814  Publication year： Sep. 1982 
JST Material Number： C0789A  ISSN： 0022-5355  CODEN： JVSTAL  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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Carbon

About Carbon

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
イオンビーム

About イオンビーム

, 
スパッタ蒸着

About スパッタ蒸着

, 
ダイヤモンド

About ダイヤモンド

, 
薄膜

About 薄膜


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