Art
J-GLOBAL ID:200902012569317088   Reference number:83A0163931

Ion beam sputter-deposited diamondlike films.

イオンビームスパッタ蒸着ダイヤモンド様薄膜
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Volume: 21  Issue:Page: 807-814  Publication year: Sep. 1982 
JST Material Number: C0789A  ISSN: 0022-5355  CODEN: JVSTAL  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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