Term

J-GLOBAL ID：200906057179242930

sputtered deposition

物質の構造
Synonyms (7)：

sputter deposition (スパッタ蒸着法)
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sputter deposition method (スパッタ蒸着法)
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sputtering deposition (スパッタリング堆積)
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sputter deposition (スパッタ堆積)
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sputter deposition (スパッタリング蒸着)
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Related terms (2)：

plasma sputtering (プラズマスパッタリング)
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dc sputtering (DCスパッタリング)
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Broader terms (1)：

physical vapor deposition (物理蒸着)
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Narrower terms (1)：

RF magnetron sputtering (RFマグネトロンスパッタリング)
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