Art
J-GLOBAL ID：200902013522595302
Reference number：86A0310181
UHF bulk-acoustic-wave filters utilizing thin ZnO/SiO2-diaphragms on silicon.
シリコン上の薄いZnO/SiO2ダイヤフラム使用のUHF弾性実体波フィルタ
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Author (3)：
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Material：
Volume：
25
Issue：
3
Page：
371-375
Publication year：
Mar. 1986
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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