Non-metallic acid generators for i-line and g-line chemically amplified resists.

BRUNSVOLD W; MONTGOMERY W; HWANG B

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J-GLOBAL ID：200902013922875606 Reference number：91A0776319

Non-metallic acid generators for i-line and g-line chemically amplified resists.

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Author (3)： , ,
Material：
Volume： 1466 Page： 368-376 Publication year： 1991
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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