Art
J-GLOBAL ID:200902015714274200
Reference number:84A0187550
Materialien fuer die Kathoden-Zerstaeubung.
陰極スパッタリング用材料
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Author (1):
Material:
Volume:
33
Issue:
1
Page:
3-9
Publication year:
Feb. 1984
JST Material Number:
E0348A
ISSN:
0042-2266
CODEN:
VAKTA
Document type:
Article
Article type:
解説
Country of issue:
Germany, Federal Republic of (DEU)
Language:
GERMAN (DE)
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JST classification (1):
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition
Terms in the title (1):
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