Term
J-GLOBAL ID:200906081344981724 

cathodic sputtering

Subject category:
Subject category
Subject category of the technical term.
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Sciterm (1):
Sciterm
Terms compiled by the various academic associations and the Ministry of Education, Culture, Sports, Science and Technology.
  • 分光学編(増訂版) / 陰極スパッター / cathode spattering
Synonyms (2):
Related terms  (1):
Broader terms  (1):
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