Surface profile measurement with a scanning differential ac interferometer.

MAKOSCH G; DROLLINGER B

Art

J-GLOBAL ID：200902026785484143 Reference number：85A0191363

Surface profile measurement with a scanning differential ac interferometer.

走査差動ac干渉計による表面形状測定

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Author (2)： ,
Material：
Volume： 23 Issue： 24 Page： 4544-4553 Publication year： Dec. 15, 1984
JST Material Number： B0026B ISSN： 1559-128X CODEN： APOPAI Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Interferometry and interferometers

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