Art
J-GLOBAL ID：200902029102811631
Reference number：92A0050672
Characerization of reactive ion etching of glass and its applications in integrated optics.
ガラスの反応性イオンエッチングの評価と集積光学への応用
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Author (2)：
,
Material：
Volume：
9
Issue：
5
Page：
2709-2712
Publication year：
Sep. 1991
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of plasma
, Optical integrated circuits,integrated optics
Terms in the title (5)：
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