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J-GLOBAL ID:200902029102811631   Reference number:92A0050672

Characerization of reactive ion etching of glass and its applications in integrated optics.

ガラスの反応性イオンエッチングの評価と集積光学への応用
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Volume:Issue:Page: 2709-2712  Publication year: Sep. 1991 
JST Material Number: C0789B  ISSN: 0734-2101  CODEN: JVTAD6  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Applications of plasma  ,  Optical integrated circuits,integrated optics 
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