Art
J-GLOBAL ID：200902032707875683
Reference number：91A0548342
Plasma-Chemical Vapor-Deposited Silicon Oxide/Silicon Oxynitride Double-Layer Antireflective Coating for Solar Cells.
プラズマ化学蒸着による酸化けい素/酸窒化けい素二重層構造の太陽電池用反射防止被覆
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Author (1)：
Material：
Volume：
30
Issue：
5
Page：
997-1001
Publication year：
May. 1991
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Solar cell
, Oxide thin films
Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
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