Term

J-GLOBAL ID：200906002933306240

plasma CVD

物質の構造
Synonyms (33)：

plasma-enhanced CVD (プラズマ増強CVD)
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plasma enhanced chemical vapor deposition (プラズマ強化化学蒸着)
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PECVD
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plasma deposition (プラズマ蒸着)
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プラズマCVD方法
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Related terms (2)：

plasma polymerization (プラズマ重合)
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plasma deposited coating (プラズマ蒸着被覆)
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Broader terms (1)：

chemical vapor deposition (化学蒸着)
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Narrower terms (2)：

reactive plasma deposition (反応性プラズマ蒸着)
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microwave plasma CVD (マイクロ波プラズマCVD)
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