plasma CVD

物質の構造
Synonyms (33)：

plasma-assisted chemical vapor deposition (プラズマ支援化学気相蒸着)
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plasma enhanced chemical vapor deposition (プラズマ支援化学蒸着)
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plasma-assisted chemical vapor deposition (プラズマ支援化学蒸着法)
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plasma-enhanced chemical vapor deposition (プラズマ励起化学気相法)
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plasma enhanced chemical vapor deposition (プラズマ促進化学蒸着)
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Related terms (4)：

plasma polymerization (プラズマ重合)
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plasma CVD coating (プラズマCVDコーティング)
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plasma deposited coating (プラズマ蒸着被覆)
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remote plasma (リモートプラズマ)
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Broader terms (1)：

chemical vapor deposition (化学蒸着)
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Narrower terms (2)：

reactive plasma deposition (反応性プラズマ蒸着)
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microwave plasma CVD (マイクロ波プラズマCVD)
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