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J-GLOBAL ID:200902034269126640   Reference number:92A0277167

Dynamic Observations of Interface Propagation during Silicon Oxidation.

シリコン酸化中における界面伝搬の動的観察
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Volume: 68  Issue: 11  Page: 1782-1785  Publication year: Mar. 16, 1992 
JST Material Number: H0070A  ISSN: 0031-9007  CODEN: PRLTAO  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Oxide thin films  ,  Surface structure of semiconductors 
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