Art
J-GLOBAL ID：200902035340133129   Reference number：91A0608964

Tribological characteristics of amorphous carbon films investigated by point contact microscopy.

点接触顕微鏡(PCM)で調べた非晶質炭素膜の摩擦特性
Author (3)：
MIYAMOTO T

About MIYAMOTO T

(NTT Applied Electronics Lab., Tokyo, JPN)

About NTT Applied Electronics Lab., Tokyo, JPN

, 
KANEKO R

About KANEKO R

(NTT Applied Electronics Lab., Tokyo, JPN)

About NTT Applied Electronics Lab., Tokyo, JPN

, 
MIYAKE S

About MIYAKE S

(Nippon Inst. Technology, Saitama, JPN)

About Nippon Inst. Technology, Saitama, JPN


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 9  Issue： 2 Pt 2  Page： 1336-1339  Publication year： Mar. 1991 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
amorphous state

About amorphous state

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
点接触顕微鏡

About 点接触顕微鏡


   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=91A0608964&from=J-GLOBAL&jstjournalNo=E0974A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
点接触

About 点接触

, 
顕微鏡

About 顕微鏡

, 
PCM

About PCM

, 
非晶質

About 非晶質

, 
炭素膜

About 炭素膜

, 
摩擦特性

About 摩擦特性


Return to Previous Page

TOP

BOTTOM