Art
J-GLOBAL ID：200902035428540549   Reference number：88A0395603

Ion beam bombardment effects during film deposition.

膜蒸着中のイオンビーム照射効果
Author (2)：
ROSSNAGEL S M

About ROSSNAGEL S M

(IBM T J Watson Research Center, NY, USA)

About IBM T J Watson Research Center, NY, USA

, 
CUOMO J J

About CUOMO J J

(IBM T J Watson Research Center, NY, USA)

About IBM T J Watson Research Center, NY, USA


Material：
Vacuum

About Vacuum


Volume： 38  Issue： 2  Page： 73-81  Publication year： 1988 
JST Material Number： E0347A  ISSN： 0042-207X  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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evaporated film

About evaporated film

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
反応性イオンビーム蒸着

About 反応性イオンビーム蒸着


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Irradiational changes in properties and structures in general 
(BK16121W)

About Irradiational changes in properties and structures in general

,  Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
蒸着

About 蒸着

, 
イオンビーム

About イオンビーム

, 
照射効果

About 照射効果


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