Spatially and temporally resolved laser-induced fluorescence measurements of CF<sub>2</sub> and CF radicals in a CF<sub>4</sub>rf plasma.

BOOTH J P; HANCOCK G; PERRY N D; TOOGOOD M J

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J-GLOBAL ID：200902041640135360 Reference number：90A0097621

Spatially and temporally resolved laser-induced fluorescence measurements of CF₂ and CF radicals in a CF₄rf plasma.

CF₄rfプラズマ中のCF₂,CFラジカルの空間および時間分解レーザ励起蛍光の測定

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Material：
Volume： 66 Issue： 11 Page： 5251-5257 Publication year： Dec. 01, 1989
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Plasma diagnostics

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Spatially and temporally resolved laser-induced fluorescence measurements of CF2 and CF radicals in a CF4rf plasma.

Spatially and temporally resolved laser-induced fluorescence measurements of CF₂ and CF radicals in a CF₄rf plasma.