Art
J-GLOBAL ID:200902045789505778   Reference number:92A0277475

Friction coefficient of Si-C, Ti-C and Ge-C coatings with excess carbon formed by plasma-assisted chemical vapour deposition.

プラズマ支援化学蒸着で作製した過剰炭素をもつSi-C,Ti-C,Ge-C被覆の摩擦係数
Author (2):
Material:
Volume: 208  Issue:Page: 158-160  Publication year: Feb. 28, 1992 
JST Material Number: B0899A  ISSN: 0040-6090  Document type: Article
Article type: 短報  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds  ,  Mechanical properties of solids in general  ,  Vapor plating 

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