A review of laser-microchemical processing.

EHRLICH D J; TSAO J Y

Art

J-GLOBAL ID：200902047620722187 Reference number：84A0246500

A review of laser-microchemical processing.

レーザ微細化学処理に関するレビュー

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=84A0246500&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=84A0246500&from=J-GLOBAL&jstjournalNo=E0974A") }}

Author (2)： ,
Material：
Volume： 1 Issue： 4 Page： 969-984 Publication year： Oct. 1983
JST Material Number： E0974A ISSN： 1071-1023 CODEN： JVTBD9 Document type： Article
Article type：文献レビュー Country of issue： United States (USA) Language： ENGLISH (EN)

,...

To see more with JDream III (charged). {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=84A0246500&from=J-GLOBAL&jstjournalNo=E0974A") }}

Laser irradiation effects and damages , Photochemical reactions , Manufacturing technology of solid-state devices

, ,

Return to Previous Page