Synthesis of diamonds by use of microwave plasma chemical-vapor deposition: Morphology and growth of diamond films.

KOBASHI K; NISHIMURA K; KAWATE Y; HORIUCHI T

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J-GLOBAL ID：200902048298182291 Reference number：89A0003726

Synthesis of diamonds by use of microwave plasma chemical-vapor deposition: Morphology and growth of diamond films.

マイクロ波プラズマ化学蒸着を利用したダイアモンドの合成ダイアモンド膜の形態と成長

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Material：
Volume： 38 Issue： 6 Page： 4067-4084 Publication year： Aug. 15, 1988
JST Material Number： D0746A ISSN： 1098-0121 CODEN： PRBMDO Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor thin films , Surface structure of semiconductors

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