Art
J-GLOBAL ID：200902048488596408   Reference number：91A0263995

Historical overview of SIMOX.

SIMOXの歴史的展望
Author (1)：
IZUMI K

About IZUMI K

(NTT LSI Lab., Atsugi-shi, JPN)

About NTT LSI Lab., Atsugi-shi, JPN


Material：
Vacuum

About Vacuum


Volume： 42  Issue： 5/6  Page： 333-340  Publication year： 1991 
JST Material Number： E0347A  ISSN： 0042-207X  Document type： Article
Article type： 文献レビュー  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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SOI structure

About SOI structure

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Materials of solid-state devices 
(NC03020K)

About Materials of solid-state devices

,  金属-絶縁体-半導体構造【’81~’92】 
(BM03074V)

About 金属-絶縁体-半導体構造【’81~’92】

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
SIMOX

About SIMOX

, 
歴史

About 歴史

, 
展望

About 展望


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