Thin films from energetic cluster impact: A feasibility study.

HABERLAND H; KARRAIS M; MALL M; THURNER Y

Art

J-GLOBAL ID：200902049951263142 Reference number：92A0778795

Thin films from energetic cluster impact: A feasibility study.

活性クラスタ衝撃による薄膜

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Author (4)： , , ,
Material：
Volume： 10 Issue： 5 Page： 3266-3271 Publication year： Sep. 1992
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Metallic thin films

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