Art
J-GLOBAL ID:200902051876383085   Reference number:91A0005854

High velocity carbon dioxide snow for cleaning vacuum system surfaces.

真空系の表面を洗浄するための高速二酸化炭素スノー
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Volume:Issue:Page: 3881-3883  Publication year: Sep. 1990 
JST Material Number: C0789B  ISSN: 0734-2101  CODEN: JVTAD6  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Vacuum production and techniques  ,  Manufacturing technology of solid-state devices 
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