Art
J-GLOBAL ID：200902051876383085   Reference number：91A0005854

High velocity carbon dioxide snow for cleaning vacuum system surfaces.

真空系の表面を洗浄するための高速二酸化炭素スノー
Author (2)：
LAYDEN L

About LAYDEN L

(BOC Group Technical, New Jersey)

About BOC Group Technical, New Jersey

, 
WADLOW D

About WADLOW D

(BOC Group Technical, New Jersey)

About BOC Group Technical, New Jersey


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 8  Issue： 5  Page： 3881-3883  Publication year： Sep. 1990 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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surface treatment

About surface treatment

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Vacuum production and techniques 
(BA02020L)

About Vacuum production and techniques

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
真空

About 真空

, 
洗浄

About 洗浄

, 
酸化炭素

About 酸化炭素


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