About OHNSTEIN T
About Honeywell, Inc., Minnesota
About FUKIURA T
About Yamatake-Honeywell, Tokyo, JPN
About RIDLEY J
About Honeywell, Inc., Minnesota
About BONNE U
About Honeywell, Inc., Minnesota
About Proceedings. IEEE Micro Electro Mechanical Systems, 1990
About fine patterning
About Manufacturing technology of solid-state devices
About 微細加工
About シリコン
About マイクロバルブ