Art
J-GLOBAL ID：200902059277424122   Reference number：89A0201385

Thickness uniformity of vacuum deposited layers.

真空蒸着層の厚さ均一性
Author (5)：
TODOROVA S

About TODOROVA S

(Technical Univ. “A Kanchev”, Russe, BGR)

About Technical Univ. “A Kanchev”, Russe, BGR

, 
POPOV D

About POPOV D

(Technical Univ. “A Kanchev”, Russe, BGR)

About Technical Univ. “A Kanchev”, Russe, BGR

, 
DIMITROV E

About DIMITROV E

(Technical Univ. “A Kanchev”, Russe, BGR)

About Technical Univ. “A Kanchev”, Russe, BGR

, 
DOCHEV D

About DOCHEV D

(Technical Univ. “A Kanchev”, Russe, BGR)

About Technical Univ. “A Kanchev”, Russe, BGR

, 
KANEV M

About KANEV M

(Technical Univ. “A Kanchev”, Russe, BGR)

About Technical Univ. “A Kanchev”, Russe, BGR


Material：
Vacuum

About Vacuum


Volume： 38  Issue： 8/10  Page： 869-872  Publication year： 1988 
JST Material Number： E0347A  ISSN： 0042-207X  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
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ferrochromium

About ferrochromium

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

Terms in the title (2)：
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真空蒸着

About 真空蒸着

, 
厚さ均一性

About 厚さ均一性


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