Art
J-GLOBAL ID:200902059277424122   Reference number:89A0201385

Thickness uniformity of vacuum deposited layers.

真空蒸着層の厚さ均一性
Author (5):
Material:
Volume: 38  Issue: 8/10  Page: 869-872  Publication year: 1988 
JST Material Number: E0347A  ISSN: 0042-207X  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=89A0201385&from=J-GLOBAL&jstjournalNo=E0347A") }}
JST classification (1):
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition 
Terms in the title (2):
Terms in the title
Keywords automatically extracted from the title.

Return to Previous Page