Art
J-GLOBAL ID：200902060662441745   Reference number：84A0074362

Radical species in argon-silane discharges.

アルゴン-シラン放電のラジカル種
Author (4)：
ROBERTSON R

About ROBERTSON R

, 
HILS D

About HILS D

, 
CHATHAM H

About CHATHAM H

, 
GALLAGHER A

About GALLAGHER A

(National Bureau of Standards, Colorado)

About National Bureau of Standards, Colorado


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 43  Issue： 6  Page： 544-546  Publication year： Sep. 15, 1983 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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Argon

About Argon

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Reaction due to charged particle bombardment and electric discharge 
(CB06020R)

About Reaction due to charged particle bombardment and electric discharge

,  Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
アルゴン

About アルゴン

, 
シラン

About シラン

, 
放電

About 放電


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