Art
J-GLOBAL ID:200902064047348919   Reference number:88A0187172

An active air bearing. Ultra-precision control of floating position and vibration.

能動空気軸受 浮上方向の位置と振動の超精密制御
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Material:
Volume: 54  Issue:Page: 329-334  Publication year: Feb. 1988 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Bearings 
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