Art
J-GLOBAL ID：200902064249923451   Reference number：92A0721601

A small-distortion two-dimensional position-sensitive detector (PSD) with on-chip MOSFET switches.

チップ上にMOSFET開閉器を備えたゆがみの小さい二次元位置に感ずる検出器(PSD)
Author (2)：
MORIKAWA Y

About MORIKAWA Y

(Nippon Steel Corp., Kawasaki, JPN)

About Nippon Steel Corp., Kawasaki, JPN

, 
KAWAMURA K

About KAWAMURA K

(Shizuoka Inst. Science and Technology, Fukuroi, JPN)

About Shizuoka Inst. Science and Technology, Fukuroi, JPN


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： 34  Issue： 2  Page： 123-129  Publication year： Aug. 1992 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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MOSFET

About MOSFET

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

About Measuring methods and instruments of length,area,cross section,volume,angle

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
MOSFET

About MOSFET

, 
ゆがみ

About ゆがみ

, 
検出器

About 検出器

, 
PSD

About PSD


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