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J-GLOBAL ID:200902067502137785   Reference number:86A0245124

Point-defect generation during oxidation of silicon in dry oxygen. I Theory.

乾燥酸素中のシリコン酸化の際の点欠陥生成 I 理論
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Volume: 59  Issue:Page: 2541-2550  Publication year: Apr. 01, 1986 
JST Material Number: C0266A  ISSN: 0021-8979  CODEN: JAPIAU  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Lattice defects in semiconductors 
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