Art
J-GLOBAL ID:200902067502137785
Reference number:86A0245124
Point-defect generation during oxidation of silicon in dry oxygen. I Theory.
乾燥酸素中のシリコン酸化の際の点欠陥生成 I 理論
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Author (2):
,
Material:
Volume:
59
Issue:
7
Page:
2541-2550
Publication year:
Apr. 01, 1986
JST Material Number:
C0266A
ISSN:
0021-8979
CODEN:
JAPIAU
Document type:
Article
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
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JST classification (1):
JST classification
Category name(code) classified by JST.
Lattice defects in semiconductors
Terms in the title (5):
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