Art

J-GLOBAL ID：200902067753513999   Reference number：92A0656141

Integration of ferroelectric thin films into nonvolatile memories.

Author (4)： SINHAROY S (Westinghouse Science & Technology Center, Pennsylvania) ,  BUHAY H (Westinghouse Science & Technology Center, Pennsylvania) ,  LAMPE D R (Westinghouse Advanced Technology Division, Maryland) ,  FRANCOMBE M H (Westinghouse Science & Technology Center, Pennsylvania)
Material： Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)
Volume： 10  Issue： 4 Pt 2  Page： 1554-1561  Publication year： Jul. 1992 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Country of issue： United States (USA)  Language： ENGLISH (EN)